Multi-technique ultra-high vacuum cluster (from growth to STM)

Together with the technical group EpiCM, we have developed an evolutive ultra-high vacuum (UHV) cluster comprising advanced material preparation tools, from surface preparation to molecular/atomic beam epitaxy, chemical vapour deposition and pulsed laser deposition. The cluster is fully equipped with in situ spectroscopies, high resolution electron diffraction and scanning tunneling microscopy. Four large UHV chambers are interconnected along a long UHV transfer tunnel.
This cluster allows us to prepare a variety of 2D materials, including graphene, oxides, transition metal dichalcogenides, and molecular ones, as well as more advanced systems based on them, so called hybrids combining them with e.g. nanoclusters, ultra-thin films, or molecules.


Multi purpose ultra-high vacuum system composed of four chambers

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