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Séminaire MCBT

Mardi 24 octobre à 11h00,
Salle Louis Weil, E424

Orateur : Marc FAUCHER (CNRS-IEMN, Villeneuve d’Ascq)
"Advances in Atomic Force Microscope instrumentation using high frequency MEMS and NEMS probes"


Today, Atomic Force Microscopes that we use in our laboratories are based on probes and head designs dating back to the 90’s. Despite progresses in the microsystems community, most of the work related to commercial AFM instrumentation has consisted in incremental optimization of tips and optical beam deflexion readout. This imposes now major limitations for high speed AFM, vacuum setups, and many other metrological domains. Our approach is to propose novel probes based on MEMS/NEMS : using batch process silicon technology, specific vibration modes and integrated transducers, AFM with higher bandwidth/sensitivity can be envisioned in the near future [1],[2].

[1] S. Houmadi, B. Legrand, J. P. Salvetat, B. Walter, E. Mairiaux, J. P. Aimé, et al., "When capacitive transduction meets the thermomechanical limit : Towards femto-newton force sensors at very high frequency," in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015, pp. 150-153.
[2] B. Walter, E. Mairiaux, and M. Faucher, "Atomic force microscope based on vertical silicon probes," Applied Physics Letters, vol. 110, p. 243101, 2017.

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