Boron-doped superlattices and Bragg mirrors in diamond

A periodic modulation of the boron doping level of single crystal diamond multilayers over more than 3 orders of magnitude during epitaxial growth by Microwave Plasma-enhanced Chemical Vapor Deposition is shown to yield Bragg mirrors in the visible. The thicknesses and doping level of the individual layers were controlled by in situ spectroscopic ellipsometry, enabling to tune the reflectance peak to the wavelength range of diamond color centers such as NV 0 or NV - . The crystalline quality, periodicity and sharpness of the doping transitions in these doping superlattices over tens of periods were confirmed by high resolution X-ray diffraction.

In situ monitoring of the polarization ratio at 803 nm during the periodically alternated growth of p + and non intentionally doped i diamond, separated by short H 2 flushes, leading to sample SL1.
Reflectance spectra of diamond doping superlattices SL1, SL2, SL3 and SL4 measured at room temperature under an angle of incidence of 12±3°.

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